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2026-06-03
Using Graph Attention for Virtual Metrology in Semiconductor Manufacturing (Intel Foundry, ASU) - Semiconductor Engineering
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semiengineering.com 2026-06-03 Semiconductor Engineering
Researchers from Arizona State University and Intel Foundry have published “Graph Attention-Based Virtual Metrology for Film Deposition Processes in Semiconductor Manufacturing”. Abstract “Artificial intelligence-driven semiconductor manufacturing increasingly operates at nanometer and angstrom scales, where precise process control depends on accurate and timely metrology. However, physical metro
Virtual MetrologyGraph Attention MechanismSemiconductor ManufacturingFilm DepositionArtificial IntelligenceEquipment Sensor DataProcess ControlProcess Optimization
2026-05-27
Curvilinear Masks Push The Limits Of Inspection And Metrology
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semiengineering.com 2026-05-27 Gregory Haley
As high-NA EUV approaches, mask makers need new metrics, model-based checks, and curvil...
Curvilinear masksPhotomaskInspection technologyMetrologyEUV lithographyHigh-NA EUVMask data preparationMulti-beam writing
2026-05-13
Rigaku Speeds Next-Gen Semiconductor Metrology Development - World Business Outlook
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worldbusinessoutlook.com 2026-05-13 World Business Outlook
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2026-05-12
Rigaku Accelerates Next-generation Semiconductor Metrology Development Leveraging World-Class Research Infrastructure – News Hub - Medianet News Hub
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newshub.medianet.com.au 2026-05-12 Medianet News Hub
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2026-05-12
Rigaku Accelerates Next-generation Semiconductor Metrology Development Leveraging World-Class Research Infrastructure - PA Media
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pressreleasehub.pa.media 2026-05-12 PA Media
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2026-05-12
Rigaku Accelerates Next-generation Semiconductor Metrology Development Leveraging World-Class Research Infrastructure - Business Wire
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news.google.com 2026-05-12 Business Wire
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2026-05-12
Rigaku Accelerates Next-generation Semiconductor Metrology Development Leveraging World-Class Research Infrastructure - Morningstar
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www.morningstar.com 2026-05-12 Morningstar
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2026-05-12
Semiconductor Metrology/Inspection Is Capturing the Economics of Advanced Packaging - Dr. Robert Castellano's Semiconductor Deep Dive Newsletter
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drrobertcastellano.substack.com 2026-05-12 Dr. Robert Castellano's Semiconductor Deep Dive Newsletter
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2026-05-11
Wooptix Targets AI Packaging Bottleneck with Astronomy Tech
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eetimes.com 2026-05-11 Pat Brans
A Canary Islands startup brings wavefront imaging to semiconductor metrology, aiming to tackle wafer shape challenges in 3D integration.
Semiconductor PackagingAI ChipsAdvanced Packaging3D IntegrationWavefront SensingAstronomy TechnologyWafer MetrologyWafer Warpage
2026-05-06
Semiconductor metrology and standards will ensure the UK plays to its strengths - Physics World
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physicsworld.com 2026-05-06 Physics World
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