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2026-06-30
Nature
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Open access
Published: 30 June 2026
AlGaN/GaN HEMT H₂ sensor with integrated Wheatstone bridge and on-chip microheater for 0.1-ppm detection
Yu Yu, Yan Liu, Wenbin Ren, Yunpeng Liu, Yulong Zhang, Zihan Wang, Qiming Zhuo, Zewen Liu, Tao Wang & Jianwen Sun
Microsystems & Nanoengineering
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12, Article number: 249 (2026) Cite this article
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