www.geneonline.com
2026-05-27
geneonline.com
Entegris and JSR Corporation/Inpria Corporation announced a non-exclusive cross-licensing agreement pertaining to extreme ultraviolet (EUV) lithography. The agreement involves the licensing of intellectual property related to EUV lithography technology.
The cross-licensing agreement allows both companies to utilize each other’s patents in the field of EUV lithography. This arrangement is non-excl