China begins mass production of homegrown immersion chipmaking machines in major breakthrough, report claims

According to The Information, a Shanghai-based state-backed company has begun mass production of immersion deep ultraviolet (DUV) lithography machines and is set to deliver the first units to SMIC, Hu... Read original →

The mass production of domestically developed immersion DUV lithography systems marks a pivotal step toward self-reliance in high-end semiconductor manufacturing equipment. Although critical components still rely on Japanese suppliers, this development significantly reduces dependency on foreign vendors and eases the impact of export controls. For SMIC, Hua Hong, and ChangXin, this could unlock new capacity and reshape process strategies, though current performance lags behind ASML’s offerings. As U.S. restrictions tighten, Chinese firms are accelerating investments in alternatives like nanoimprint and multipatterning to reduce reliance on EUV. If supply chain bottlenecks ease, domestic equipment adoption could surge within a year. However, full industry autonomy remains a multi-year goal. This shift may prompt ASML to restructure global production and push Chinese manufacturers to enhance integration and precision capabilities.