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News / EQS / VAT Media Release on Acquisition of Atonarp VAT Media Release on Acquisition of Atonarp 2 min read VACN “Ad hoc announcement pursuant to Art. 53 LR” With semiconductor manufacturing moving below 2nm, in-situ, real-time monitoring and control inside process chambers is becoming critical. Atonarp’s novel mass spectrometry–based sensors capture the full process fingerprint—including prec