ASML spinout Invisix raises €20 million to inspect chips using X-ray technology - Techzine Global

Invisix, a spinout from ASML based in Eindhoven, has raised €20 million to advance chip inspection using soft X-ray technology. As semiconductor processes scale down to 2nm and below, traditional opti... Read original →

Invisix’s soft X-ray metrology isn’t just an incremental upgrade—it’s a structural fix to the yield crisis at sub-3nm nodes. As optical scatterometry fails to resolve complex 3D architectures like GAA or CFET, its high-harmonic-generation-based system enables simultaneous extraction of over four times more parameters, directly boosting HBM yield for NVIDIA and AMD. This forces KLA and Hitachi High-Tech into rapid counter-innovation, while raising red flags in U.S.-Netherlands export controls over coherent X-ray sources. Samsung and TSMC (Taiwan, China) will race to secure early access, tying metrology capability to AI chip supply security. Within 18 months, such tools will shift from optional add-ons to mandatory process enablers, reshaping capex allocation toward inspection and enabling ASML-style co-integration with EUV platforms.